Real-time Particle Deposition Monitoring of Operational Cleanroom Quality
Real-time particle deposition monitoring is a new way to monitor the operational quality of a cleanroom. Up to now the performance of a cleanroom is often monitored with light-scattering airborne particle counters. These give valuable information on airborne particles, but no information on the potentially threatening macroparticles in a cleanroom. In this paper, particle deposition phenomena and ways to determine particle deposition are discussed. A real-time particle deposition monitor using holographic imaging of the witness plates in a sensing device is described. Some practical experiences with real-time particle deposition measurements are demonstrated. Real-time particle deposition monitoring can be a valuable method to control the operational quality of a cleanroom where personnel are working.Abstract
Contributor Notes
ABOUT THE AUTHOR
Koos Agricola is an Applied Physicist and has worked in Research of Development at Océ Technologies, a Canon Company, since 1986. His role includes responsibilities in the cleanrooms and in contamination control for the manufacturing of critical parts of printers, in particular cleaning, coating (including thin films), machine vision and micro-assembly with a focus on Product Oriented Contamination Control. In his spare time, Koos assists Technology of Sense b.v. as a Contamination Control Specialist. Koos is Secretary of the VCCN (Dutch Contamination Control Society); Executive Board Member of ICCCS (International Confederation of Contamination Control Societies); serves on the ICEB (International Cleanroom Education Board); and is a technical expert on ISO/TC 209 Working Groups 1, 3, 4, 11, 12, and 13 and on CEN/TC 243 Working Group 5. Koos is also treasurer of the CTCB-I (Cleanroom Testing and Certification Board – International) and regularly teaches various Cleanroom Technology subjects.