A Test Method for Measuring Surface Cleanliness with Respect to Nonviable Liquid Contaminants

In cleanroom environments, minimization of surface contamination is critical. As contaminants can be trapped in liquid droplets, the ability of a substrate to remove liquid from a surface is crucial to maintaining the cleanliness of a cleanroom. The focus of this paper is a test method designed to measure the cleaning efficiency of a substrate under various wiping conditions. The intent is to utilize this method to determine the effectiveness of a given cleaning procedure.