Editorial Type:
Article Category: Research Article
 | 
Online Publication Date: 30 Sept 2005

How Clean Is It? The Use of Ion Chromatography to Monitor Contamination in Cleanroom Environments

Page Range: 93 – 97
DOI: 10.17764/jiet.45.1.u1r5u8087g535rl1
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Cleanrooms pose a special challenge for cleanliness testing. Contaminants in the form of particles, metals, ions, and organics must be completely removed to ensure defect-free processing. Ions such as chloride, sulfate, nitrate, and ammonia can degrade water surfaces, particularly in the presence of adsorbed water. A number of analytical methods are used to test for cleanliness and contamination control Ion chromatography is used to determine ionic contamination. The presentation will answer the following questions:

• What is ion chromatography?

• How is ion chromatography used to evaluate cleanliness?

• What are the recent improvements that have been made to the technology?

• What are some typical cleanliness testing applications?

• How will the use of ion chromatography help my company?

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