A Three-Dimensional UltrasonicAnemometer to Measure the Performance of Clean Zone Air Delivery Systems

The three-dimensional ultrasonic anemometer (3DUA) is an instrument that can measure airflow velocities in three axes simultaneously. From the data gathered, airflow direction and air tubulence intensity may be determined. Using a propietary software package, results are available immediately on-line, in either a tabular or graphic format. This instrument was initially chosen to evaluate the performance of a new cleanroom ceiling system that had integrated the lighting and sprinklers within the filter support grid. Additional work was later performed to evaluate the impact of a membrane ceiling on a turbulent air supply.