Editorial Type:
Article Category: Research Article
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Online Publication Date: 05 Oct 2006

Cleanroom Wipers: Particle Generation

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Page Range: 33 – 38
DOI: 10.17764/jiet.2.33.6.510h1471v35nw56x
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Cleanroom wipers are essential in precision cleaning processes. Particles are to be removed by these wipers, and testing and quality control are extremely important. This presentation offers results obtained by various methods used to test particle generation from commercially available wipers. This study explores possible mechanisms of particle generation and attempts to identify a realistic testing method that simulates conditions of wiper use.

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