Aerosol Charging and Neutralization and Electrostatic Discharge in Clean Rooms

This paper describes the role of electrical charge on particle transport and deposition and the neutralization of particle electrostatic charge by ionized air. The level of electrical charge on airborne particles and the rate of charge neutralization by bipolar ions have been reviewed and the effect of charge on particle deposition on semiconductor waters discussed. Finally, the use of high voltage ionizers for electrostatic control in clean rooms is discussed.